Product TOP
New Standard for Accuracy Evaluation of Precision Stage
- High Resolution, High Frequency
- Enables high accuracy measurement equivalent to an interferometer, with no atmospheric effect.
- Uses zero expansion glass, unaffected by ambient temperature
- Greater working distance of sensor head enables easy installation. Also enables vertical installation.
Specifications
| Main Specifications | ||||||
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The Laserscale uses a semiconductor laser. The laser beam is harmful to the human body, so please do not look into the detection head section. Magnescale reserves the right to change product specifications without prior notice. |
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| Model | SET-SC2020 | |||||
| Measuring length | 200×200 mm | |||||
| Signal cycle | 400 nm | |||||
| Max. Resolution | 10 pm | |||||
| Cumulative accuracy | ±0.5 µm (After compensation, scale measuring length 200 × 200 mm) | |||||
| Working distance | 2.9±0.2 mm | |||||
| XY Orthogonality | ±0.3 s (After compensation) | |||||
| Scale material and the thermal expansion coefficient | Zero expansion glass: 0.1×10-6/℃ | |||||
| Scale base material and the thermal expansion coefficient | SS400 : 11.8×10-6/℃, Quartz glass : 0.5×10-6/℃ | |||||
| Measuring speed | 300 mm/s | |||||
| Sensor head mass | 0.2 kg (without cable) | |||||
| Cable length | 3 m | |||||
| Input and output signals | BiSS C for Incremental, USB | |||||
| Packaging | With carry case | |||||
| Software | Measurement software (CSV output), roundness measurement software, lissajous monitoring software | |||||
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Dimensions
Instruction manual
Catalog
| SET-SC2020 | Japanese |  |
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| SET-SC2020 | English | |