株式会社マグネスケール

Laserscale Products

Laserscale Resolution Finally Reaches the realm of picometer

Laserscale resolution is poised to surpass not only the nano level, but also the realm of picometers. Development aimed at resolutions that anticipate customer needs has indeed progressed at the pace of Moore’s Law.* The high resolution and stability of Laserscale supports advanced measurement and positioning control. Laserscale are essential in fields requiring superior precision and resolution, such as next-gen semiconductor manufacturing and camera lens mold fabrication. Meanwhile, we have continued to anticipate customer needs by expanding the scope of measurement from one dimension to two, and with Z sensors, to three, and by developing one of the world’s most precise encoders for angular measurement.

*Moore’s Law
: Posits that semiconductor integration doubles about every two years. Drawn from the experience of Intel cofounder Gordon Moore in 1965.

Features of Laserscale

  • Grating interferometer scale technology

    It uses a lattice interferometer developed by Magnescale for the detection principle, which enables measurement and control unaffected by temperature, air pressure, and air turbulence.

  • Holographically generated scale.

    Because the scale is holographic, it provides an output signal with excellent linearity.

  • Excellent interpolation processing technology

    Our proprietary interpolation circuit and signal compensation technology can provide excellent interpolation accuracy.

Technology topics

Geschütztes holographisches Gitter
Ultrahohe Auflösung Großes S/N-Verhältnis

Application

  • Ultra high precision air stages (vacuum resistant)

  • Surface roughness/ contour measuring machines

  • DUV-based automatic wafer defect classification systems

  • Non-contact measuring machines

  • Micro grinders

  • Aspherical surface machining

Lineup

  • Series
  • Specifications
  • Model / Material
  • BS Series

    Maximum resolution2.1 pm
    Signal pitch138 nm
    Low noise4 pm
    Maximum measurement length
    Low expansion glass420 nm
    Soda lime glass960 mm
    Thermal expansion coefficient
    Low expansion glass-0.7×10-6/℃
    Soda lime glass8×10-6/℃
    Maximum response speed400 mm/s

    Transmissive type ultra-high resolution Laserscale

    BS78、BS65
    Scale Material :
    Low expansion glass (BS78)
    Soda lime grass (BS65)

  • BH series

    Maximum resolution3.8 pm
    Signal pitch250 nm
    Maximum measurement length640 mm
    Thermal expansion coefficient
    ZERO glass0.1×10-6/℃
    Alkali-free glass3.7×10-6/℃
    Maximum response speed1,800 mm/s

    Reflective type ultra-high resolution Laserscale

    BH25
    Scale Material :ZERO glass
    Alkali-free glass

  • BL series

    Maximum resolution6.1 pm
    Signal pitch400 nm
    Maximum measurement length570 mm
    Response speed
    When BD700 is connected3,000 mm/s
    Analog Output5,000 mm/s
    Thermal expansion coefficient
    ZERO glass0.1×10-6/℃
    Alkali-free glass3.7×10-6/℃

    Reflective type high response speed Laserscale

    BL50H
    Scale Material : ZERO glass
    Alkali-free glass

  • BL series

    Maximum resolution10 nm
    Signal pitch400 nm
    Maximum measurement length
    Low expansion glass420 mm
    Soda lime glass1060 mm
    Thermal expansion coefficient
    Low expansion glass-0.7×10-6/℃
    Soda lime glass8×10-6/℃
    Maximum response speed3,000 mm/s

    Transmissive type high response speed Laserscale

    BL57
    Scale Material : Low expansion glass
    Soda lime glass

  • BH Series

    Maximum resolution1.5 nrad
    Signal pitch250 nm

    Reflective type ultra-high resolution Laserscale

    BH20
    Scale material : Crown glass

Products

Search by resolution

Catalog PDF

Products