Product TOP
High-speed and high-resolution, while maintaining stable, ultraprecision measuring. Ideal for precision stages, semiconductor inspection/manufacturing systems, and ultraprecision processing machines.
- High-resolution scale with signal pitch of approx. 138 nm, outperforming light wave interferometer systems
- High stability, unaffected by humidity, air pressure and air disturbances
- Reference point accuracy : ±0.1 µm
- Scale accuracy : ±0.04 µm (measuring length : 40 mm)
- Non-contact design eliminates return error.
- Measuring length : 40 to 420 mm, 9 types (-R/-RS)
- Measuring length : 10 to 420 mm, 10 types (-N/-NS)
- Special non-magnetic and vacuum-compatible models available
- Using low expansion glass : -0.7 x10-6 °C (measuring length : 10 to 420 mm)
- Resolution : 2.1 pm
Specifications
| Specifications | ||
|---|---|---|
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The Laserscale uses a semiconductor laser. The laser beam is harmful to the human body, so please do not look into the detection head section. Magnescale reserves the right to change product specifications without prior notice. |
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| Model | BS78 | |
| Measuring length | 10 (only N/NS) / 40 / 70 / 120 / 170 / 220 / 270 / 320 / 370 / 420 | |
| Overall length | 58 mm (L = 10 mm : open type scale), L +26 mm (L = 40 mm to 420 mm) L : Measuring length |
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| Max. travel | L + 2 mm (L = 10 mm : open type scale), L +10 mm (L = 40 mm to 420 mm) L: Measuring length |
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| Scale accuracy (at 20 °C) |
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| Grating pitch | Approx. 0.55 µm | |
| Signal pitch | Approx. 0.138 µm (Approx. 138 nm) | |
| Reference point accuracy | ±0.1 µm (Only R/RS type) | |
| Reference point position | At the center, and every 50 mm from the center to the left and to the right (BS78 models with measuring lengths of 320, 370, 420 mm : 20 mm offset from the center at 50 mm intervals) |
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| Reference point detection direction | Single direction | |
| Thermal expansion coefficient | -0.7×10-6/℃ | |
| Light source | Semiconductor laser : Wavelength 790 nm, Output 6 mW | |
| Radiation power | DHHS class 1 | |
| Detection principle | Diffraction grating scanning system | |
| Operating temperature | +10 to +30 °C (no condensation) | |
| Storage temperature | -10 to 50 °C (humidity 60 % or less) | |
| Max. response speed | 400 mm/s | |
Catalog
| BS78 Series | Japanese |  |
|---|---|---|
| BS78 Series | English | |