Product TOP
Laserscale for high resolution and high speed motion control.
It can be used for high-speed control of stages and picometer-level fine control, as well as a sensor for high-resolution tilt control of tilt tables.
- Maximum resolution : 6.1 pm Maximum response speed : 3 m/s
- Wide angle tolerance of ±30 min
- Equipped with a long-life laser diode
- Low noise
- Excellent interpolation accuracy in combination with BD700
- 1.5D and 2D scales are also available
Specifications
1D Scale unit
| Specifications | ||
|---|---|---|
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(*) : For measuring length exceeding 570 mm, please contact our sales department. Magnescale reserves the right to change product specifications without prior notice. |
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| Model | BL50H-SZ＊＊＊＊＊ | BL50H-SA＊＊＊＊＊ |
| Scale material | Zero expansion glass 0.1 x 10-6/°C | Non-alkaline glass 3.7 x 10-6/°C |
| Measuring length | 30 to 1,070 mm (*) | |
| Grating pitch | 1.6 µm | |
| Reference point position | User definable (within the range of measuring length) or None | |
| Accuracy (at 20 °C) |
±0.5 µm / 30 to 120 mm, ±1 µm / 170 to 270 mm, ±3 µm / 320 to 670 mm (±1.5 µm with special specification), ±5 µm / 770 to 970 mm (±3 µm with special specification), ±5 µm / 1,070 mm, ±0.2 µm / 1,070 mm or less (with BD700 compensation) (*1) |
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| Interpolation accuracy | ±50 pm (with interpolator BD700) | |
1.5D/2D Scale unit
| Specifications | |||
|---|---|---|---|
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(*1) : 2D scales larger than 300 mm x 300 mm are also available by special order. Please contact our sales department. (*2) : (to 2 mm) are special specifications. Magnescale reserves the right to change product specifications without prior notice. |
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| 1.5D | 2D | ||
| Zero expansion glass | X | 30 to 770 mm | 500 mm x 600 mm in 50 mm increments for both X and Y (*1) |
| Y | Standard 1 mm (to 2 ㎜) (*2) | Non-alkaline glass | X | 30 to 770 mm | 500 mm x 600 mm in 50 mm increments for both X and Y (*1) |
| Y | Standard 1 mm (to 2 ㎜) (*2) | ||
Head unit
| Specifications | ||
|---|---|---|
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(*) : Converted to A/B quadrature, serial interface of various protocols, and analog output by BD700 interpolator |
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The Laserscale uses a semiconductor laser. The laser beam is harmful to the human body, so please do not look into the detection head section. Magnescale reserves the right to change product specifications without prior notice. |
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| Model | BL50H-FSE＊＊D | BL50H-FSE＊＊H |
| Output signal | Interpolator BD700 connection (*) | Analog 1 Vp-p |
| Signal pitch | 400 nm | |
| Max. resolution | 6.1 pm | － |
| Max. response speed | 3 m/s (5 m/s with special handling) | |
| Clearance | Zero expansion glass : 3.4 ±0.2 mm, Non-alkaline glass : 3.8 ±0.2 mm | |
| Angle tolerance | Yaw : ±8.7 mrad, Pitch : ±8.7 mrad, Roll : ±8.7 mrad | |
| Head cable length | 0.5 m, 1 m, 3 m, 6 m | |
| Operating temperature | +10 to +40 °C (No condensation) | |
Dimensions
| Product name | 2D | 3D | |
|---|---|---|---|
| Japanese | English | ||
| BL50H | Download | – | – |
Instruction manual
Catalog
| BL50H Series | English |  |
|---|---|---|
| BL50H Series | Deutsch | |
| BL50H Series | Japanese | |