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High-accuracy, reflective Laserscale with signal pitch of 250 nm. Ideal for low-profile stages, semiconductor back-end processing equipment and precision microscopes
- Signal pitch : 250 nm
- High accuracy : ±1 µm / 420 mm
- High response speed : 1,800 mm/s
- Maximum resolution : 3.8 pm
- Available : with/without reference point
- Completely non-contact design : Return error is theoretically eliminated.
- Scale : ZERO glass / alkali-free glass
- Thin head with thickness of 12 mm
- Supporting various resolutions and output modes (Depending on an interpolator such as BD96 or BD700)
- Special vacuum-compatible models available
Specifications
| Specifications | ||
|---|---|---|
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The Laserscale uses a semiconductor laser. The laser beam is harmful to the human body, so please do not look into the detection head section. Magnescale reserves the right to change product specifications without prior notice. |
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| Model | BH25-RED | BH25-NED |
| Measuring length | 30 / 70 / 120 / 170 / 220 / 270 / 320 / 370 / 420 mm (ZERO glass / alkali-free glass) | |
| Overall length | Measuring length +26 mm | |
| Max. travel | Measuring length +10 mm | |
| Scale accuracy (at 20 °C) | ±0.5 µm (30 to 170 mm) ±1.0 µm (220 to 420 mm) | |
| Grating pitch | 1.0 µm | |
| Signal pitch | 0.25 µm (250 nm) | |
| Reference point | With reference point | None |
| Reference point detection direction | Single direction | None |
| Thermal expansion coefficient | 0.1×10-6/°C (ZERO glass) 3.7 x 10-6/°C (alkali-free glass) | |
| Light source | Semiconductor laser : Wavelength 790 nm, Output 6 mW | |
| Detection principle | Diffraction grating scanning system | |
| Operating temperature | +10 to +30 °C (no condensation) | |
| Storage temperature | -10 to +50 °C (humidity less than 60 %) | |
| Max. response speed | 1,800 mm/s | |
| Output signal | Interpolator connection, etc. | |
| Output resolution | Depend on the number of interpolator divisions | |
Dimensions
Instruction manual
Catalog
| BH25 series | Japanese |  |
|---|---|---|
| BH25 series | English | |