Laserscale Resolution Finally Reaches the realm of picometer
Laserscale resolution is poised to surpass not only the nano level, but also the realm of picometers. Development aimed at resolutions that anticipate customer needs has indeed progressed at the pace of Moore’s Law.* The high resolution and stability of Laserscale supports advanced measurement and positioning control. Laserscale are essential in fields requiring superior precision and resolution, such as next-gen semiconductor manufacturing and camera lens mold fabrication. Meanwhile, we have continued to anticipate customer needs by expanding the scope of measurement from one dimension to two, and with Z sensors, to three, and by developing one of the world’s most precise encoders for angular measurement.
*Moore’s Law
: Posits that semiconductor integration doubles about every two years. Drawn from the experience of Intel cofounder Gordon Moore in 1965.
Features of Laserscale
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Grating interferometer scale technology
It uses a lattice interferometer developed by Magnescale for the detection principle, which enables measurement and control unaffected by temperature, air pressure, and air turbulence.
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Holographically generated scale.
Because the scale is holographic, it provides an output signal with excellent linearity.
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Excellent interpolation processing technology
Our proprietary interpolation circuit and signal compensation technology can provide excellent interpolation accuracy.
Technology topics
Application
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Ultra high precision air stages (vacuum resistant)
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Surface roughness/ contour measuring machines
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DUV-based automatic wafer defect classification systems
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Non-contact measuring machines
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Micro grinders
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Aspherical surface machining
Lineup
- Series
- Specifications
- Model / Material
-
BS Series
Maximum resolution2.1 pm
Signal pitch138 nm
Low noise4 pm
Maximum measurement length
Low expansion glass420 mm
Thermal expansion coefficient
Low expansion glass-0.7×10-6/℃
Maximum response speed400 mm/sTransmissive type ultra-high resolution Laserscale
BS78
Scale Material :
Low expansion glass (BS78) -
BH series
Maximum resolution3.8 pm
Signal pitch250 nm
Maximum measurement length Low expansion glass420 mm
Soda-lime glass420 mm
Zero expansion glass640 mm
Non-alkaline glass640 mm
Thermal expansion coefficient
Low expansion glass-0.7×10-6/℃
Soda-lime glass8×10-6/℃
Zero expansion glass0.1×10-6/℃
Non-alkaline glass3.7×10-6/℃
Maximum response speed1,800 mm/sReflective type ultra-high resolution Laserscale
BH25
Scale Material :Low expansion glass
Soda-lime glass
Zero expansion glass
Non-alkaline glass -
BL50H
Maximum resolution6.1 pm
Signal pitch400 nm
Maximum measurement length1D1,070 mm
1.5DX: 770 mm
Y: 1 mm
2D500 x 600 mm
Maximum response speed3 m/s
(5 m/s with
special
handling)
Thermal expansion coefficient
Zero expansion glass0.1×10-6/℃
Non-alkaline glass3.7×10-6/℃Reflective type high response speed Laserscale
BL50H
Scale Material : Zero expansion glass
Non-alkaline glass -
BL series
Maximum resolution10 nm
Signal pitch400 nm
Maximum measurement length
Low expansion glass420 mm
Soda-lime glass1,060 mm
Thermal expansion coefficient
Low expansion glass-0.7×10-6/℃
Soda-lime glass8×10-6/℃
Maximum response speed3,000 mm/sTransmissive type high response speed Laserscale
BL57
Scale Material : Low expansion glass
Soda-lime glass -
BH Series
Maximum resolution0.09 nrad
Signal pitch250 nmReflective type ultra-high resolution Laserscale
BH20
Scale material : Crown glass
