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High-accuracy, reflective Laserscale with signal pitch of 250 nm.
Ideal for low-profile stages, semiconductor back-end processing equipment and precision microscopes
- Signal pitch : 250 nm
- High accuracy : ±1 µm / 420 mm (Soda-lime glass, Low expansion glass), ±5 µm / 640 mm (Zero expansion glass, Non-alkaline glass)
- High response speed : 1,800 mm/s
- Max. resolution : 3.8 pm
- Available : with/without reference point
- Completely non-contact design : Return error is theoretically eliminated.
- Scale : Soda-lime glass / Low expansion glass / Zero expansion glass / Non-alkaline glass
- Thin head with thickness of 12 mm
- Supporting various resolutions and output modes (Depending on the interpolator connected such as BD700.)
- Special vacuum-compatible models available
Specifications
| Specifications | ||
|---|---|---|
|
The Laserscale uses a semiconductor laser. The laser beam is harmful to the human body, so please do not look into the detection head section. Magnescale reserves the right to change product specifications without prior notice. |
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| Model | BH25-RED | BH25-NED |
| Measuring length | 30 / 70 / 120 / 170 / 220 / 270 / 320 / 370 / 420 mm (Low expansion glass, Soda-lime glass) 30 / 70 / 120 / 170 / 220 / 270 / 320 / 370 / 420 / 470 / 520 / 570 / 640 (Zero expansion glass, Non-alkaline glass) |
|
| Overall length | Measuring length +26 mm | |
| Max. travel | Measuring length +10 mm | |
| Scale accuracy (at 20 °C) | ±0.5 µm (30 to 170 mm) ±1.0 µm (220 to 420 mm) ±5.0 µm (470 to 640 mm) | |
| Grating pitch | 1.0 µm | |
| Signal pitch | 0.25 µm (250 nm) | |
| Reference point | With reference point | None |
| Reference point detection direction | Single direction | None |
| Thermal expansion coefficient | -0.7×10-6/°C (Low expansion glass) 8×10-6/°C (Soda-lime glass) 0.1×10-6/°C (Zero expansion glass) 3.7×10-6/°C (Non-alkaline glass) |
|
| Light source | Semiconductor laser : Wavelength 790 nm, Output 6 mW | |
| Detection principle | Diffraction grating scanning system | |
| Operating temperature | +10 to +30 °C (No condensation) | |
| Storage temperature | -10 to +50 °C (Humidity less than 60 %) | |
| Max. response speed | 1,800 mm/s | |
| Output signal | Interpolator BD700 | |
| Resolution | BD700 connection (Depend on the number of divisions) | |
Dimensions
Instruction manual
Catalog
Please refer to the Laserscale General catalog.
https://www.magnescale.com/en/ laserscale /