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BH25Laserscale

BH25 Laserscale

Features
Specifications
Dimensions
Manual
Catalog

Features

High-accuracy, reflective Laserscale with signal pitch of 250nm Ideal for low-profile stages, semiconductor back-end processing equipment and precision microscopes

Signal pitch : 250nm
High accuracy : ±1μm/420mm
High response speed : 700mm/s
Minimum resolution : 0.03125nm
Available : with/without reference point
Completely non-contact design : Return error is theoretically eliminated.
Scale : Soda-lime glass/Low expansion glass
Thin head with thickness of 12mm
Supporting various resolutions and output modes (Depending on the interpolator connected.)
Special vacuum-compatible models available

Specifications

Specifications
Magnescale reserves the right to change product specifications without prior notice.
Model	BH25-RED	BH25-NED
Measuring length	30/70/120/170/220/270/320/370/420 mm (Low expansion glass/Soda-lime glass)
Overall length	Measuring length +26mm
Max. travel	Measuring length +10mm
Scale accuracy（at 20℃）	±0.5μm (30 to 170mm) ±1.0μm (220 to 420mm)
Grating pitch	1.0μm
Signal pitch	0.25μm (250nm)
Reference point	With reference point	None
Reference point detection direction	Single direction	None
Output signal	Interpolator BD96
Resolution	BD96 connection(Depend on the number of divisions )
Thermal expansion coefficient	-0.7×10^-6/℃（Low expansion glass） 8 x 10^-6/℃ (Soda-lime glass)
Light source	Semiconductor laser : Wavelength 790nm, Output 6mW
Detection principle	Diffraction grating scanning system
Operating temperature	10 to 30˚C (No condensation)
Storage temperature	-10 to 50˚C (Humidity less than 60%)
Max. response speed	700mm/s (When connected with BD96)

Dimensions

*Please contact our sales department.

Manual

*Please contact us if you cannot download the file.

Catalog

BH25 Series	Japanese
BH25 Series	English

*Please contact us if you cannot download the file.

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