Magnescale Co., Ltd. || Magnescale(R), Laserscale(R), Digital Gauge

Dec. 6th, 2017

SEMICON Japan 2017 Exhibition

On December 13 – 15, 2017 in Tokyo Big Sight

East Hall 2 - 2735

Magnescale Co., Ltd. will be exhibiting at SEMICON Japan 2017 from December 13th to 15th.

We will present an ultra-high resolution positioning Laserscale which has out gas and non magnetic counter measurement for ‎the next-generation devices of Semiconductor and LCD panel. Visitors will see the tilt stage demonstration which can detect 1/1000 sec, ultra-high resolution non-contact displacement meter, as well as a wide variety of Laserscale products applicable in vacuum environments, self-compensating 2D scale, and high accuracy rotary encoder for calibration realizing.

We are looking forward to your visit and working with you in the future.


Date10:00~17:00 Dec. 13-15, 2017
Venue Tokyo Big Sight East Hall 2 - 2735
SEMICON Japan 2017 official website

Main Exhibits

Main products exhibited

CategoryProduct nameThe feature of exhibits
Laserscale for calibration 2D scale ‎2D scale is suitable for the calibration on XY stage encoder ±0.2arcsec orthogonality. Calibration can be done easily compared to interferometer.
Ultra-high accuracy rotary encoder Rotary encoder for calibration realizing with 0.2 arcsec accuracy.
Small-sized rotary scale BH20 Magnescale presents wide range of rotary scale from diameter 6mm to 42mm. The smallest diameter of 6mm scale, which weight is only 0.06g, has ultra-high resolution up to 0.6nrad. Small sized rotary scale is for controlling galvanometer mirror and polygon mirror.
Vacuum correspondence linear Laserscale BS78 All series can be used in vacuum environment.
BS78 is the highest accuracy Laserscale which realize 2.1pm resolution and ±3pm low noise.
BH25 BH25 achieving 3.8pm resolution, has great temperature dependency with 0.3mm/c and realize low-driven measurement in long-term usage.
BL57 High-speed type of BL57 series achieves the fastest response speed as fast as 3m/s and 100pm high resolution.
BF1 BF1 series has the widest mounting tolerances for installation.
Linear Magnescale for Built-in scale and transporting machinery SmartSCALE SmartSCALE achieves 50nm resolution, which head and scale is non-contact principle, offers high resistance to water splashing and sludge on metal chips.

For more information, contact the president office at