Dec. 6th, 2017
On December 13 – 15, 2017 in Tokyo Big Sight
East Hall 2 - 2735
Magnescale Co., Ltd. will be exhibiting at SEMICON Japan 2017 from December 13th to 15th.
We will present an ultra-high resolution positioning Laserscale which has out gas and non magnetic counter measurement for the next-generation devices of Semiconductor and LCD panel. Visitors will see the tilt stage demonstration which can detect 1/1000 sec, ultra-high resolution non-contact displacement meter, as well as a wide variety of Laserscale products applicable in vacuum environments, self-compensating 2D scale, and high accuracy rotary encoder for calibration realizing.
We are looking forward to your visit and working with you in the future.
Date | 10:00~17:00 Dec. 13-15, 2017 |
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Venue | Tokyo Big Sight East Hall 2 - 2735 |
SEMICON Japan 2017 official website | http://www.semiconjapan.org/en/ |
Category | Product name | The feature of exhibits |
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Laserscale for calibration | 2D scale | 2D scale is suitable for the calibration on XY stage encoder ±0.2arcsec orthogonality. Calibration can be done easily compared to interferometer. |
Ultra-high accuracy rotary encoder | Rotary encoder for calibration realizing with 0.2 arcsec accuracy. | |
Small-sized rotary scale | BH20 | Magnescale presents wide range of rotary scale from diameter 6mm to 42mm. The smallest diameter of 6mm scale, which weight is only 0.06g, has ultra-high resolution up to 0.6nrad. Small sized rotary scale is for controlling galvanometer mirror and polygon mirror. |
Vacuum correspondence linear Laserscale | BS78 | All series can be used in vacuum environment. BS78 is the highest accuracy Laserscale which realize 2.1pm resolution and ±3pm low noise. |
BH25 | BH25 achieving 3.8pm resolution, has great temperature dependency with 0.3mm/c and realize low-driven measurement in long-term usage. | |
BL57 | High-speed type of BL57 series achieves the fastest response speed as fast as 3m/s and 100pm high resolution. | |
BF1 | BF1 series has the widest mounting tolerances for installation. | |
Linear Magnescale for Built-in scale and transporting machinery | SmartSCALE | SmartSCALE achieves 50nm resolution, which head and scale is non-contact principle, offers high resistance to water splashing and sludge on metal chips. |
For more information, contact the president office at info-mgs@magnescale.com