Dec. 6th, 2017
SEMICON Japan 2017 Exhibition
On December 13 – 15, 2017 in Tokyo Big Sight
East Hall 2 - 2735
Magnescale Co., Ltd. will be exhibiting at SEMICON Japan 2017 from December 13th to 15th.
We will present an ultra-high resolution positioning Laserscale which has out gas and non magnetic counter measurement for the next-generation devices of Semiconductor and LCD panel. Visitors will see the tilt stage demonstration which can detect 1/1000 sec, ultra-high resolution non-contact displacement meter, as well as a wide variety of Laserscale products applicable in vacuum environments, self-compensating 2D scale, and high accuracy rotary encoder for calibration realizing.
We are looking forward to your visit and working with you in the future.
Outline
| Date | 10:00～17:00 Dec. 13-15, 2017 |
|---|---|
| Venue | Tokyo Big Sight East Hall 2 - 2735 |
| SEMICON Japan 2017 official website | http://www.semiconjapan.org/en/ |
Main Exhibits
- Laserscale
- Tilt stage measurement demonstration of “BH25” series.
- High resolution rotary scale which is the most suited for the control of galvanometer mirror and polygon mirror.
- Self-compensating 2D scale.
- Wide variety of Laserscale lineup leading the next generation of nano technology, including ultra-high accuracy and ultra-high resolution Laserscale “BS78” series offering usage in vacuum environments.
- SmartSCALE
- SmartSCALE with small head achieves water and dust proof (equivalent to IP65) and a maximum resolution is 50nm. SmartSCALE can be used in wide variety of application such as manufacturing and transporting machinery.
Main products exhibited
| Category | Product name | The feature of exhibits |
|---|---|---|
| Laserscale for calibration | 2D scale | 2D scale is suitable for the calibration on XY stage encoder ±0.2arcsec orthogonality. Calibration can be done easily compared to interferometer. |
| Ultra-high accuracy rotary encoder | Rotary encoder for calibration realizing with 0.2 arcsec accuracy. | |
| Small-sized rotary scale | BH20 | Magnescale presents wide range of rotary scale from diameter 6mm to 42mm. The smallest diameter of 6mm scale, which weight is only 0.06g, has ultra-high resolution up to 0.6nrad. Small sized rotary scale is for controlling galvanometer mirror and polygon mirror. |
| Vacuum correspondence linear Laserscale | BS78 | All series can be used in vacuum environment. BS78 is the highest accuracy Laserscale which realize 2.1pm resolution and ±3pm low noise. |
| BH25 | BH25 achieving 3.8pm resolution, has great temperature dependency with 0.3mm/c and realize low-driven measurement in long-term usage. | |
| BL57 | High-speed type of BL57 series achieves the fastest response speed as fast as 3m/s and 100pm high resolution. | |
| BF1 | BF1 series has the widest mounting tolerances for installation. | |
| Linear Magnescale for Built-in scale and transporting machinery | SmartSCALE | SmartSCALE achieves 50nm resolution, which head and scale is non-contact principle, offers high resistance to water splashing and sludge on metal chips. |
For more information, contact the president office at info-mgs@magnescale.com